Method for preventing micromechanical structures from adhering to another object
Abstract
A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface. 3 figs.
- Inventors:
- Issue Date:
- Research Org.:
- AT&T
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 672539
- Patent Number(s):
- 5766367
- Application Number:
- PAN: 8-645,976
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 16 Jun 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MECHANICAL STRUCTURES; ADHESION; MINIATURIZATION; MITIGATION; SURFACE COATING
Citation Formats
Smith, J H, and Ricco, A J. Method for preventing micromechanical structures from adhering to another object. United States: N. p., 1998.
Web.
Smith, J H, & Ricco, A J. Method for preventing micromechanical structures from adhering to another object. United States.
Smith, J H, and Ricco, A J. Tue .
"Method for preventing micromechanical structures from adhering to another object". United States.
@article{osti_672539,
title = {Method for preventing micromechanical structures from adhering to another object},
author = {Smith, J H and Ricco, A J},
abstractNote = {A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {6}
}
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