Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using ``safe`` silicon source gas
Abstract
A method is described for producing hydrogenated amorphous silicon on a substrate by flowing a stream of safe (diluted to less than 1%) silane gas past a heated filament. 7 figs.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 672509
- Patent Number(s):
- 5776819
- Application Number:
- PAN: 8-222,720
- Assignee:
- Midwest Research Inst., Kansas City, MO (United States)
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 7 Jul 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; SILICON; AMORPHOUS STATE; SILANES; CHEMICAL VAPOR DEPOSITION; SAFETY ENGINEERING; CHEMICAL REACTORS
Citation Formats
Mahan, A. H., Molenbroek, E. C., and Nelson, B. P. Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using ``safe`` silicon source gas. United States: N. p., 1998.
Web.
Mahan, A. H., Molenbroek, E. C., & Nelson, B. P. Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using ``safe`` silicon source gas. United States.
Mahan, A. H., Molenbroek, E. C., and Nelson, B. P. Tue .
"Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using ``safe`` silicon source gas". United States.
@article{osti_672509,
title = {Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using ``safe`` silicon source gas},
author = {Mahan, A. H. and Molenbroek, E. C. and Nelson, B. P.},
abstractNote = {A method is described for producing hydrogenated amorphous silicon on a substrate by flowing a stream of safe (diluted to less than 1%) silane gas past a heated filament. 7 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {7}
}
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