Self-cleaning rotating anode x-ray source

Paulikas, A P

Title: Self-cleaning rotating anode x-ray source

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Abstract

A self-cleaning rotating anode x-ray source comprising and evacuable housing, a rotatable cylindrical anode within the housing, a source of electrons within the housing which electrons are caused to impinge upon the anode to produce x-rays, and means for ionizing residual particles within the housing and accelerating such ions so as to impinge upon the anode to sputter impurities from the surface thereof. 2 figs.

Inventors:: Paulikas, A P

Issue Date:: 1987-06-02

Research Org.:: Argonne National Lab. (ANL), Argonne, IL (United States)

OSTI Identifier:: 6718758

Patent Number(s):: 6056825

Assignee:: ANL; ERA-14-001600; EDB-88-186309

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/68785 - {characterised by the mechanical construction of the susceptor, stage or support}
H01L21/68742 - {characterised by a lifting arrangement, e.g. lift pins}

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DOE Contract Number:: W-31109-ENG-38

Resource Type:: Patent

Resource Relation:: Other Information: Portions of this document are illegible in microfiche products

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; X-RAY SOURCES; DESIGN; ANODES; INVENTIONS; SPUTTERING; SURFACE CLEANING; CLEANING; ELECTRODES; EQUIPMENT; RADIATION SOURCES; SURFACE FINISHING; X-RAY EQUIPMENT; 440300* - Miscellaneous Instruments- (-1989)

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                    Paulikas, A P. Self-cleaning rotating anode x-ray source.  United States: N. p., 1987. 
        Web.

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                    Paulikas, A P. Self-cleaning rotating anode x-ray source.  United States.

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                    Paulikas, A P. Tue .  
        "Self-cleaning rotating anode x-ray source".  United States.

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@article{osti_6718758,

  title        = {Self-cleaning rotating anode x-ray source},

  author       = {Paulikas, A P},

  abstractNote = {A self-cleaning rotating anode x-ray source comprising and evacuable housing, a rotatable cylindrical anode within the housing, a source of electrons within the housing which electrons are caused to impinge upon the anode to produce x-rays, and means for ionizing residual particles within the housing and accelerating such ions so as to impinge upon the anode to sputter impurities from the surface thereof. 2 figs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1987},

  month        = {6}

}

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