Method of deposition by molecular beam epitaxy
Abstract
A method is described for reproducibly controlling layer thickness and varying layer composition in an MBE deposition process. In particular, the present invention includes epitaxially depositing a plurality of layers of material on a substrate with a plurality of growth cycles whereby the average of the instantaneous growth rates for each growth cycle and from one growth cycle to the next remains substantially constant as a function of time. 9 figures.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6654749
- Patent Number(s):
- 5379719
- Application Number:
- PPN: US 8-097500
- Assignee:
- Sandia National Laboratories, Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 26 Jul 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; MATERIALS; MOLECULAR BEAM EPITAXY; CHEMICAL COMPOSITION; CRYSTAL GROWTH; TIME DEPENDENCE; EPITAXY; 360601* - Other Materials- Preparation & Manufacture; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360101 - Metals & Alloys- Preparation & Fabrication
Citation Formats
Chalmers, S A, Killeen, K P, and Lear, K L. Method of deposition by molecular beam epitaxy. United States: N. p., 1995.
Web.
Chalmers, S A, Killeen, K P, & Lear, K L. Method of deposition by molecular beam epitaxy. United States.
Chalmers, S A, Killeen, K P, and Lear, K L. Tue .
"Method of deposition by molecular beam epitaxy". United States.
@article{osti_6654749,
title = {Method of deposition by molecular beam epitaxy},
author = {Chalmers, S A and Killeen, K P and Lear, K L},
abstractNote = {A method is described for reproducibly controlling layer thickness and varying layer composition in an MBE deposition process. In particular, the present invention includes epitaxially depositing a plurality of layers of material on a substrate with a plurality of growth cycles whereby the average of the instantaneous growth rates for each growth cycle and from one growth cycle to the next remains substantially constant as a function of time. 9 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}
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