Acoustic resonator and method of making same
Abstract
A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6633642
- Application Number:
- ON: DE84014655
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- W-7405-ENG-82
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; RESONATORS; DESIGN; FABRICATION; ACOUSTIC MONITORING; ACOUSTICS; ALUMINIUM; GALLIUM ARSENIDES; MECHANICAL STRUCTURES; ARSENIC COMPOUNDS; ARSENIDES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; GALLIUM COMPOUNDS; METALS; MONITORING; PNICTIDES; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Kline, G R, and Lakin, K M. Acoustic resonator and method of making same. United States: N. p., 1983.
Web.
Kline, G R, & Lakin, K M. Acoustic resonator and method of making same. United States.
Kline, G R, and Lakin, K M. Thu .
"Acoustic resonator and method of making same". United States.
@article{osti_6633642,
title = {Acoustic resonator and method of making same},
author = {Kline, G R and Lakin, K M},
abstractNote = {A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Oct 13 00:00:00 EDT 1983},
month = {Thu Oct 13 00:00:00 EDT 1983}
}
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