skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Acoustic resonator and method of making same

Abstract

A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.

Inventors:
;
Issue Date:
OSTI Identifier:
6633642
Application Number:
ON: DE84014655
Assignee:
Dept. of Energy
DOE Contract Number:  
W-7405-ENG-82
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; RESONATORS; DESIGN; FABRICATION; ACOUSTIC MONITORING; ACOUSTICS; ALUMINIUM; GALLIUM ARSENIDES; MECHANICAL STRUCTURES; ARSENIC COMPOUNDS; ARSENIDES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; GALLIUM COMPOUNDS; METALS; MONITORING; PNICTIDES; 420200* - Engineering- Facilities, Equipment, & Techniques

Citation Formats

Kline, G R, and Lakin, K M. Acoustic resonator and method of making same. United States: N. p., 1983. Web.
Kline, G R, & Lakin, K M. Acoustic resonator and method of making same. United States.
Kline, G R, and Lakin, K M. Thu . "Acoustic resonator and method of making same". United States.
@article{osti_6633642,
title = {Acoustic resonator and method of making same},
author = {Kline, G R and Lakin, K M},
abstractNote = {A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {10}
}