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Title: Fabrication process for a gradient index x-ray lens

A process is disclosed for fabricating high efficiency x-ray lenses that operate in the 0.5-4.0 keV region suitable for use in biological imaging, surface science, and x-ray lithography of integrated circuits. The gradient index x-ray optics fabrication process broadly involves co-sputtering multi-layers of film on a wire, followed by slicing and mounting on block, and then ion beam thinning to a thickness determined by periodic testing for efficiency. The process enables the fabrication of transmissive gradient index x-ray optics for the 0.5-4.0 keV energy range. This process allows the fabrication of optical elements for the next generation of imaging and x-ray lithography instruments in the soft x-ray region. 13 figures.
Inventors:
; ;
Issue Date:
OSTI Identifier:
6615994
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; EDB-95-030637
Patent Number(s):
US 5382342; A
Application Number:
PPN: US 8-004767
Contract Number:
W-7405-ENG-48
Resource Relation:
Patent File Date: 14 Jan 1993
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; LENSES; FABRICATION; BIOLOGY; INTEGRATED CIRCUITS; LAYERS; SOFT X RADIATION; SURFACES; USES; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; IONIZING RADIATIONS; MICROELECTRONIC CIRCUITS; RADIATIONS; X RADIATION 420200* -- Engineering-- Facilities, Equipment, & Techniques

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