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Title: Method of deposition of silicon carbide layers on substrates

Abstract

A method for direct chemical vapor deposition of silicon carbide to substrates, especially nuclear waste particles, is provided by the thermal decomposition of methylsilane at 800 to 1050/sup 0/C when the substrates have been confined within a suitable coating environment.

Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
6509192
Application Number:
ON: DE83006873
Assignee:
EDB-83-048396
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE WASTES FROM NUCLEAR FACILITIES; 36 MATERIALS SCIENCE; RADIOACTIVE WASTES; SURFACE COATING; SILICON CARBIDES; CHEMICAL VAPOR DEPOSITION; PARTICLES; SILANES; CARBIDES; CARBON COMPOUNDS; CHEMICAL COATING; DEPOSITION; HYDRIDES; HYDROGEN COMPOUNDS; MATERIALS; RADIOACTIVE MATERIALS; SILICON COMPOUNDS; WASTES; 052001* - Nuclear Fuels- Waste Processing; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication

Citation Formats

Angelini, P., DeVore, C.E., Lackey, W.J., Blanco, R.E., and Stinton, D.P. Method of deposition of silicon carbide layers on substrates. United States: N. p., 1982. Web.
Angelini, P., DeVore, C.E., Lackey, W.J., Blanco, R.E., & Stinton, D.P. Method of deposition of silicon carbide layers on substrates. United States.
Angelini, P., DeVore, C.E., Lackey, W.J., Blanco, R.E., and Stinton, D.P. Fri . "Method of deposition of silicon carbide layers on substrates". United States.
@article{osti_6509192,
title = {Method of deposition of silicon carbide layers on substrates},
author = {Angelini, P. and DeVore, C.E. and Lackey, W.J. and Blanco, R.E. and Stinton, D.P.},
abstractNote = {A method for direct chemical vapor deposition of silicon carbide to substrates, especially nuclear waste particles, is provided by the thermal decomposition of methylsilane at 800 to 1050/sup 0/C when the substrates have been confined within a suitable coating environment.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1982},
month = {3}
}