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Title: Nanostructure multilayer dielectric materials for capacitors and insulators

Abstract

A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO{sub 2}) and alumina (Al{sub 2}O{sub 3}). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO{sub 2}) and alumina (Al{sub 2}O{sub 3}) in alternating layers to form a nano-laminate. 1 fig.

Inventors:
;
Issue Date:
Research Org.:
Univ. of California (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
644433
Patent Number(s):
5742471
Application Number:
PAN: 8-755,619
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 21 Apr 1998
Country of Publication:
United States
Language:
English
Subject:
25 ENERGY STORAGE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; CAPACITORS; DESIGN; LAYERS; DIELECTRIC MATERIALS; ZIRCONIUM OXIDES; ALUMINIUM OXIDES; BREAKDOWN; ELECTRIC POTENTIAL

Citation Formats

Barbee, Jr, T W, and Johnson, G W. Nanostructure multilayer dielectric materials for capacitors and insulators. United States: N. p., 1998. Web.
Barbee, Jr, T W, & Johnson, G W. Nanostructure multilayer dielectric materials for capacitors and insulators. United States.
Barbee, Jr, T W, and Johnson, G W. Tue . "Nanostructure multilayer dielectric materials for capacitors and insulators". United States.
@article{osti_644433,
title = {Nanostructure multilayer dielectric materials for capacitors and insulators},
author = {Barbee, Jr, T W and Johnson, G W},
abstractNote = {A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO{sub 2}) and alumina (Al{sub 2}O{sub 3}). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO{sub 2}) and alumina (Al{sub 2}O{sub 3}) in alternating layers to form a nano-laminate. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {4}
}