Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector
Abstract
An optical heat generation and detection system generates a first non-destructive pulsed beam of electromagnetic radiation that is directed upon a sample containing at least one interface between similar or dissimilar materials. The first pulsed beam of electromagnetic radiation, a pump beam, produces a non-uniform temperature change within the sample. A second non-destructive pulsed beam of electromagnetic radiation, a probe beam, is also directed upon the sample. Physical and chemical properties of the materials, and of the interface, are measured by observing changes in a transient optical response of the sample to the probe beam, as revealed by a time dependence of changes in, by example, beam intensity, direction, or state of polarization. The system has increased sensitivity to interfacial properties including defects, contaminants, chemical reactions and delaminations, as compared to conventional non-destructive, non-contact techniques. One feature of this invention is a determination of a Kapitza resistance at the interface, and the correlation of the determined Kapitza resistance with a characteristic of the interface, such as roughness, delamination, the presence of contaminants, etc. 31 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Brown Univ., Providence, RI (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States)
- OSTI Identifier:
- 644413
- Patent Number(s):
- 5748317
- Application Number:
- PAN: 8-786,706; CNN: Grant DMR-9121747
- Assignee:
- Brown Univ. Research Foundation, Providence, RI (United States)
- DOE Contract Number:
- FG02-86ER45267
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 5 May 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; NONDESTRUCTIVE TESTING; PHYSICAL PROPERTIES; CHEMICAL PROPERTIES; INTERFACES; THIN FILMS
Citation Formats
Maris, H J, and Stoner, R J. Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector. United States: N. p., 1998.
Web.
Maris, H J, & Stoner, R J. Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector. United States.
Maris, H J, and Stoner, R J. Tue .
"Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector". United States.
@article{osti_644413,
title = {Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector},
author = {Maris, H J and Stoner, R J},
abstractNote = {An optical heat generation and detection system generates a first non-destructive pulsed beam of electromagnetic radiation that is directed upon a sample containing at least one interface between similar or dissimilar materials. The first pulsed beam of electromagnetic radiation, a pump beam, produces a non-uniform temperature change within the sample. A second non-destructive pulsed beam of electromagnetic radiation, a probe beam, is also directed upon the sample. Physical and chemical properties of the materials, and of the interface, are measured by observing changes in a transient optical response of the sample to the probe beam, as revealed by a time dependence of changes in, by example, beam intensity, direction, or state of polarization. The system has increased sensitivity to interfacial properties including defects, contaminants, chemical reactions and delaminations, as compared to conventional non-destructive, non-contact techniques. One feature of this invention is a determination of a Kapitza resistance at the interface, and the correlation of the determined Kapitza resistance with a characteristic of the interface, such as roughness, delamination, the presence of contaminants, etc. 31 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 05 00:00:00 EDT 1998},
month = {Tue May 05 00:00:00 EDT 1998}
}