Optical stress generator and detector
Abstract
Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects. 32 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Brown Univ., Providence, RI (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 644412
- Patent Number(s):
- 5748318
- Application Number:
- PAN: 8-689,287
- Assignee:
- Brown Univ. Research Foundation, Providence, RI (United States)
- DOE Contract Number:
- FG02-86ER45267
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 5 May 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; THIN FILMS; MECHANICAL PROPERTIES; THERMODYNAMIC PROPERTIES; ULTRASONIC WAVES; OPTICAL PROPERTIES; MEASURING METHODS; TEST FACILITIES; STRESS ANALYSIS; MATERIALS TESTING; INTERFACES
Citation Formats
Maris, H J, and Stoner, R J. Optical stress generator and detector. United States: N. p., 1998.
Web.
Maris, H J, & Stoner, R J. Optical stress generator and detector. United States.
Maris, H J, and Stoner, R J. Tue .
"Optical stress generator and detector". United States.
@article{osti_644412,
title = {Optical stress generator and detector},
author = {Maris, H J and Stoner, R J},
abstractNote = {Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects. 32 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {5}
}