Microlens frames for laser diode arrays
Abstract
Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter. 12 figs.
- Inventors:
- Issue Date:
- Sponsoring Org.:
- USDOE; USDOE, Washington, DC (United States)
- OSTI Identifier:
- 6431717
- Patent Number(s):
- 5923481
- Application Number:
- PPN: US 8-753656
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 27 Nov 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; DESIGN; ETCHING; FABRICATION; LENSES; MINIATURIZATION; SEMICONDUCTOR LASERS; LASERS; SEMICONDUCTOR DEVICES; SOLID STATE LASERS; SURFACE FINISHING; 426002* - Engineering- Lasers & Masers- (1990-)
Citation Formats
Skidmore, J A, and Freitas, B L. Microlens frames for laser diode arrays. United States: N. p., 1999.
Web.
Skidmore, J A, & Freitas, B L. Microlens frames for laser diode arrays. United States.
Skidmore, J A, and Freitas, B L. Tue .
"Microlens frames for laser diode arrays". United States.
@article{osti_6431717,
title = {Microlens frames for laser diode arrays},
author = {Skidmore, J A and Freitas, B L},
abstractNote = {Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter. 12 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 13 00:00:00 EDT 1999},
month = {Tue Jul 13 00:00:00 EDT 1999}
}