Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith

Friedman, L; Beuhler, R J; Matthew, M W; Ledbetter, M

Title: Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith

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Abstract

A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10/sup 6/ atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm/sup 2//sec in order to effect a precise modification in that selected area of the workpiece.

Inventors:: Friedman, L; Beuhler, R J; Matthew, M W; Ledbetter, M

Issue Date:: 1984-06-25

OSTI Identifier:: 6363223

Application Number:: ON: TI85006519

Assignee:: Dept. of Energy

DOE Contract Number:: AC02-76CH00016

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; MACHINING; ION BEAMS; APERTURES; CAVITIES; BEAMS; OPENINGS; 420200* - Engineering- Facilities, Equipment, & Techniques

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                    Friedman, L, Beuhler, R J, Matthew, M W, and Ledbetter, M. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith.  United States: N. p., 1984. 
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                    Friedman, L, Beuhler, R J, Matthew, M W, & Ledbetter, M. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith.  United States.

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                    Friedman, L, Beuhler, R J, Matthew, M W, and Ledbetter, M. Mon .  
        "Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith".  United States.

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@article{osti_6363223,

  title        = {Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith},

  author       = {Friedman, L and Beuhler, R J and Matthew, M W and Ledbetter, M},

  abstractNote = {A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10/sup 6/ atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm/sup 2//sec in order to effect a precise modification in that selected area of the workpiece.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1984},

  month        = {6}

}

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