Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith
Abstract
A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10/sup 6/ atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm/sup 2//sec in order to effect a precise modification in that selected area of the workpiece.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6363223
- Application Number:
- ON: TI85006519
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; MACHINING; ION BEAMS; APERTURES; CAVITIES; BEAMS; OPENINGS; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Friedman, L, Beuhler, R J, Matthew, M W, and Ledbetter, M. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States: N. p., 1984.
Web.
Friedman, L, Beuhler, R J, Matthew, M W, & Ledbetter, M. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States.
Friedman, L, Beuhler, R J, Matthew, M W, and Ledbetter, M. Mon .
"Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith". United States.
@article{osti_6363223,
title = {Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith},
author = {Friedman, L and Beuhler, R J and Matthew, M W and Ledbetter, M},
abstractNote = {A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10/sup 6/ atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm/sup 2//sec in order to effect a precise modification in that selected area of the workpiece.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1984},
month = {6}
}
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