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Title: Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith

Abstract

A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10/sup 6/ atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm/sup 2//sec in order to effect a precise modification in that selected area of the workpiece.

Inventors:
; ; ;
Issue Date:
OSTI Identifier:
6363223
Application Number:
ON: TI85006519
Assignee:
Dept. of Energy
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; MACHINING; ION BEAMS; APERTURES; CAVITIES; BEAMS; OPENINGS; 420200* - Engineering- Facilities, Equipment, & Techniques

Citation Formats

Friedman, L, Beuhler, R J, Matthew, M W, and Ledbetter, M. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States: N. p., 1984. Web.
Friedman, L, Beuhler, R J, Matthew, M W, & Ledbetter, M. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States.
Friedman, L, Beuhler, R J, Matthew, M W, and Ledbetter, M. Mon . "Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith". United States.
@article{osti_6363223,
title = {Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith},
author = {Friedman, L and Beuhler, R J and Matthew, M W and Ledbetter, M},
abstractNote = {A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10/sup 6/ atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm/sup 2//sec in order to effect a precise modification in that selected area of the workpiece.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1984},
month = {6}
}