Continuous cryopump with a method for removal of solidified gases

Carlson, L. W.; Herman, H.

Title: Continuous cryopump with a method for removal of solidified gases

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Abstract

An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases adsorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel. 4 figs.

Inventors:: Carlson, L. W.; Herman, H.

Issue Date:: 1988-05-05

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

OSTI Identifier:: 6362675

Patent Number(s):: 7190567

Application Number:: ON: DE89009760

Assignee:: US Dept. of Energy

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L28/55 - {with a dielectric comprising a perovskite structure material}

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DOE Contract Number:: W-31109-ENG-38

Resource Type:: Patent

Resource Relation:: Other Information: Portions of this document are illegible in microfiche products

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYOPUMPS; DESIGN; FLOW RATE; GAS FLOW; HIGH VACUUM; INVENTIONS; VALVES; CONTROL EQUIPMENT; EQUIPMENT; FLOW REGULATORS; FLUID FLOW; LABORATORY EQUIPMENT; PUMPS; VACUUM PUMPS; 420201* - Engineering- Cryogenic Equipment & Devices

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                    Carlson, L. W., and Herman, H.. Continuous cryopump with a method for removal of solidified gases.  United States: N. p., 1988. 
        Web.

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                    Carlson, L. W., & Herman, H.. Continuous cryopump with a method for removal of solidified gases.  United States.

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                    Carlson, L. W., and Herman, H.. Thu .  
        "Continuous cryopump with a method for removal of solidified gases".  United States.  https://www.osti.gov/servlets/purl/6362675.

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@article{osti_6362675,

  title        = {Continuous cryopump with a method for removal of solidified gases},

  author       = {Carlson, L. W. and Herman, H.},

  abstractNote = {An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases adsorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel. 4 figs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1988},

  month        = {5}

}

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