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Title: Continuous cryopump with a method for removal of solidified gases

Abstract

An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases adsorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel. 4 figs.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Lab., IL (USA)
OSTI Identifier:
6362675
Patent Number(s):
-US-A7190567
Application Number:
ON: DE89009760
Assignee:
US Dept. of Energy ANL; EDB-89-063887
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYOPUMPS; DESIGN; FLOW RATE; GAS FLOW; HIGH VACUUM; INVENTIONS; VALVES; CONTROL EQUIPMENT; EQUIPMENT; FLOW REGULATORS; FLUID FLOW; LABORATORY EQUIPMENT; PUMPS; VACUUM PUMPS; 420201* - Engineering- Cryogenic Equipment & Devices

Citation Formats

Carlson, L.W., and Herman, H. Continuous cryopump with a method for removal of solidified gases. United States: N. p., 1988. Web.
Carlson, L.W., & Herman, H. Continuous cryopump with a method for removal of solidified gases. United States.
Carlson, L.W., and Herman, H. Thu . "Continuous cryopump with a method for removal of solidified gases". United States.
@article{osti_6362675,
title = {Continuous cryopump with a method for removal of solidified gases},
author = {Carlson, L.W. and Herman, H.},
abstractNote = {An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases adsorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {5}
}