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Title: Coherence delay augmented laser beam homogenizer

Abstract

The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.

Inventors:
;
Issue Date:
OSTI Identifier:
6291197
Patent Number(s):
5224200
Application Number:
PPN: US 7-799524
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Patent File Date: 27 Nov 1991
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; LASER RADIATION; BEAM SHAPING; MICROELECTRONIC CIRCUITS; MASKING; APERTURES; COHERENT RADIATION; DESIGN; ETCHING; OPTICAL SYSTEMS; SPATIAL DISTRIBUTION; USES; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; OPENINGS; RADIATIONS; SURFACE FINISHING; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)

Citation Formats

Rasmussen, P, and Bernhardt, A. Coherence delay augmented laser beam homogenizer. United States: N. p., 1993. Web.
Rasmussen, P, & Bernhardt, A. Coherence delay augmented laser beam homogenizer. United States.
Rasmussen, P, and Bernhardt, A. Tue . "Coherence delay augmented laser beam homogenizer". United States.
@article{osti_6291197,
title = {Coherence delay augmented laser beam homogenizer},
author = {Rasmussen, P and Bernhardt, A},
abstractNote = {The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {6}
}