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Title: Virtually distortion-free imaging system for large field, high resolution lithography

Abstract

Virtually distortion free large field high resolution imaging is performed using an imaging system which contains large field distortion or field curvature. A reticle is imaged in one direction through the optical system to form an encoded mask. The encoded mask is then imaged back through the imaging system onto a wafer positioned at the reticle position.

Inventors:
;
Issue Date:
OSTI Identifier:
6291152
Patent Number(s):
5176970 A
Application Number:
PPN: US 7-597968
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Patent File Date: 12 Oct 1990
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; INTEGRATED CIRCUITS; MASKING; OPTICAL SYSTEMS; DESIGN; IMAGES; POSITIONING; SPATIAL RESOLUTION; ELECTRONIC CIRCUITS; MICROELECTRONIC CIRCUITS; RESOLUTION; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)

Citation Formats

Hawryluk, A M, and Ceglio, N M. Virtually distortion-free imaging system for large field, high resolution lithography. United States: N. p., 1993. Web.
Hawryluk, A M, & Ceglio, N M. Virtually distortion-free imaging system for large field, high resolution lithography. United States.
Hawryluk, A M, and Ceglio, N M. Tue . "Virtually distortion-free imaging system for large field, high resolution lithography". United States.
@article{osti_6291152,
title = {Virtually distortion-free imaging system for large field, high resolution lithography},
author = {Hawryluk, A M and Ceglio, N M},
abstractNote = {Virtually distortion free large field high resolution imaging is performed using an imaging system which contains large field distortion or field curvature. A reticle is imaged in one direction through the optical system to form an encoded mask. The encoded mask is then imaged back through the imaging system onto a wafer positioned at the reticle position.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}