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Title: Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials

Abstract

A method is described of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x](O < x < 1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x]; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x] to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x].

Inventors:
Issue Date:
OSTI Identifier:
6273988
Patent Number(s):
5238913 A
Application Number:
PPN: US 7-860337
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Patent File Date: 30 Mar 1992
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; MICROELECTRONIC CIRCUITS; FABRICATION; SUPERCONDUCTING FILMS; ETCHING; MASKING; BARIUM OXIDES; COPPER OXIDES; DEPOSITION; DOPED MATERIALS; HEATING; SUBSTRATES; SUPERCONDUCTING DEVICES; SUPERCONDUCTIVITY; THIN FILMS; ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COPPER COMPOUNDS; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELECTRONIC CIRCUITS; FILMS; MATERIALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SURFACE FINISHING; TRANSITION ELEMENT COMPOUNDS; 665412* - Superconducting Devices- (1992-)

Citation Formats

Coppa, N V. Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials. United States: N. p., 1993. Web.
Coppa, N V. Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials. United States.
Coppa, N V. Tue . "Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials". United States.
@article{osti_6273988,
title = {Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials},
author = {Coppa, N V},
abstractNote = {A method is described of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x](O < x < 1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x]; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x] to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x].},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {8}
}