Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials
Abstract
A method is described of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x](O < x < 1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x]; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x] to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x].
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6273988
- Patent Number(s):
- 5238913
- Application Number:
- PPN: US 7-860337
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 30 Mar 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; MICROELECTRONIC CIRCUITS; FABRICATION; SUPERCONDUCTING FILMS; ETCHING; MASKING; BARIUM OXIDES; COPPER OXIDES; DEPOSITION; DOPED MATERIALS; HEATING; SUBSTRATES; SUPERCONDUCTING DEVICES; SUPERCONDUCTIVITY; THIN FILMS; ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COPPER COMPOUNDS; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELECTRONIC CIRCUITS; FILMS; MATERIALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SURFACE FINISHING; TRANSITION ELEMENT COMPOUNDS; 665412* - Superconducting Devices- (1992-)
Citation Formats
Coppa, N V. Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials. United States: N. p., 1993.
Web.
Coppa, N V. Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials. United States.
Coppa, N V. Tue .
"Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials". United States.
@article{osti_6273988,
title = {Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials},
author = {Coppa, N V},
abstractNote = {A method is described of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x](O < x < 1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x]; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x] to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x].},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 24 00:00:00 EDT 1993},
month = {Tue Aug 24 00:00:00 EDT 1993}
}