Coherent multilayer crystals and method of making
Abstract
A new material is described consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 A to 2500 A. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6270465
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; SEMICONDUCTOR DEVICES; FABRICATION; SUPERCONDUCTING FILMS; SPUTTERING; SUPERLATTICES; COPPER; CRYSTAL STRUCTURE; EPITAXY; LATTICE PARAMETERS; LAYERS; NICKEL; NIOBIUM; SUBSTRATES; TITANIUM; ELEMENTS; FILMS; METALS; REFRACTORY METALS; TRANSITION ELEMENTS; 360601* - Other Materials- Preparation & Manufacture; 420800 - Engineering- Electronic Circuits & Devices- (-1989); 420201 - Engineering- Cryogenic Equipment & Devices
Citation Formats
Schuller, I K, and Falco, C M. Coherent multilayer crystals and method of making. United States: N. p., 1980.
Web.
Schuller, I K, & Falco, C M. Coherent multilayer crystals and method of making. United States.
Schuller, I K, and Falco, C M. Thu .
"Coherent multilayer crystals and method of making". United States.
@article{osti_6270465,
title = {Coherent multilayer crystals and method of making},
author = {Schuller, I K and Falco, C M},
abstractNote = {A new material is described consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 A to 2500 A. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Oct 30 00:00:00 EST 1980},
month = {Thu Oct 30 00:00:00 EST 1980}
}
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