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Title: Coherent multilayer crystals and method of making

Abstract

A new material is described consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 A to 2500 A. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.

Inventors:
;
Issue Date:
OSTI Identifier:
6270465
Assignee:
Dept. of Energy TIC; ERA-06-033566; EDB-81-111034
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; SEMICONDUCTOR DEVICES; FABRICATION; SUPERCONDUCTING FILMS; SPUTTERING; SUPERLATTICES; COPPER; CRYSTAL STRUCTURE; EPITAXY; LATTICE PARAMETERS; LAYERS; NICKEL; NIOBIUM; SUBSTRATES; TITANIUM; ELEMENTS; FILMS; METALS; REFRACTORY METALS; TRANSITION ELEMENTS; 360601* - Other Materials- Preparation & Manufacture; 420800 - Engineering- Electronic Circuits & Devices- (-1989); 420201 - Engineering- Cryogenic Equipment & Devices

Citation Formats

Schuller, I.K., and Falco, C.M. Coherent multilayer crystals and method of making. United States: N. p., 1980. Web.
Schuller, I.K., & Falco, C.M. Coherent multilayer crystals and method of making. United States.
Schuller, I.K., and Falco, C.M. Thu . "Coherent multilayer crystals and method of making". United States.
@article{osti_6270465,
title = {Coherent multilayer crystals and method of making},
author = {Schuller, I.K. and Falco, C.M.},
abstractNote = {A new material is described consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 A to 2500 A. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1980},
month = {10}
}