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Title: Liquid injection plasma deposition method and apparatus

Abstract

A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube. 8 figs.

Inventors:
;
Issue Date:
Sponsoring Org.:
USDOE; USDOE, Washington, DC (United States)
OSTI Identifier:
6201370
Patent Number(s):
5906757 A
Application Number:
PPN: US 8-533886
Assignee:
Lockheed Martin Idaho Technologies Co., Idaho Falls, ID (United States) PTO; EDB-99-079630
DOE Contract Number:  
AC07-94ID13223
Resource Type:
Patent
Resource Relation:
Patent File Date: 26 Sep 1995
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DESIGN; MATERIALS; PLASMA CONFINEMENT; PLASMA JETS; SUBSTRATES; SURFACE COATING; CONFINEMENT; DEPOSITION; 360101* - Metals & Alloys- Preparation & Fabrication; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360601 - Other Materials- Preparation & Manufacture

Citation Formats

Kong, P.C., and Watkins, A.D. Liquid injection plasma deposition method and apparatus. United States: N. p., 1999. Web.
Kong, P.C., & Watkins, A.D. Liquid injection plasma deposition method and apparatus. United States.
Kong, P.C., and Watkins, A.D. Tue . "Liquid injection plasma deposition method and apparatus". United States.
@article{osti_6201370,
title = {Liquid injection plasma deposition method and apparatus},
author = {Kong, P.C. and Watkins, A.D.},
abstractNote = {A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {5}
}