Dual surface interferometer

Pardue, R M; Williams, R R

Title: Dual surface interferometer

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Abstract

A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.

Inventors:: Pardue, R M; Williams, R R

Issue Date:: 1980-09-12

OSTI Identifier:: 6086986

Assignee:: TIC; EDB-82-003775

DOE Contract Number:: W-7405-ENG-26

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; INTERFEROMETERS; DESIGN; OPERATION; CONTROL SYSTEMS; LASERS; MACHINING; MEASURING INSTRUMENTS; 420200* - Engineering- Facilities, Equipment, & Techniques

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                    Pardue, R M, and Williams, R R. Dual surface interferometer.  United States: N. p., 1980. 
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                    Pardue, R M, & Williams, R R. Dual surface interferometer.  United States.

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                    Pardue, R M, and Williams, R R. Fri .  
        "Dual surface interferometer".  United States.

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@article{osti_6086986,

  title        = {Dual surface interferometer},

  author       = {Pardue, R M and Williams, R R},

  abstractNote = {A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1980},

  month        = {9}

}

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