Dual surface interferometer
Abstract
A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6086986
- Assignee:
- TIC; EDB-82-003775
- DOE Contract Number:
- W-7405-ENG-26
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; INTERFEROMETERS; DESIGN; OPERATION; CONTROL SYSTEMS; LASERS; MACHINING; MEASURING INSTRUMENTS; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Pardue, R.M., and Williams, R.R. Dual surface interferometer. United States: N. p., 1980.
Web.
Pardue, R.M., & Williams, R.R. Dual surface interferometer. United States.
Pardue, R.M., and Williams, R.R. Fri .
"Dual surface interferometer". United States.
@article{osti_6086986,
title = {Dual surface interferometer},
author = {Pardue, R.M. and Williams, R.R.},
abstractNote = {A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1980},
month = {9}
}