Dual surface interferometer

Title: Dual surface interferometer

Full Record
Other Related Research

Abstract

A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.

Inventors:: Pardue, R M; Williams, R R

Issue Date:: 1980-09-12

OSTI Identifier:: 6086986

Assignee:: TIC; EDB-82-003775

DOE Contract Number:: W-7405-ENG-26

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; INTERFEROMETERS; DESIGN; OPERATION; CONTROL SYSTEMS; LASERS; MACHINING; MEASURING INSTRUMENTS; 420200* - Engineering- Facilities, Equipment, & Techniques

Citation Formats


                    Pardue, R M, and Williams, R R. Dual surface interferometer.  United States: N. p., 1980. 
        Web.

Copy to clipboard


                    Pardue, R M, & Williams, R R. Dual surface interferometer.  United States.

Copy to clipboard


                    Pardue, R M, and Williams, R R. Fri .  
        "Dual surface interferometer".  United States.

Copy to clipboard


                    
@article{osti_6086986,

  title        = {Dual surface interferometer},

  author       = {Pardue, R M and Williams, R R},

  abstractNote = {A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1980},

  month        = {9}

}

Copy to clipboard

Patent:

Search for the full text at the U.S. Patent and Trademark Office

Save / Share:

Export Metadata

Save to My Library

Similar Records in DOE Patents and OSTI.GOV collections:

Polarizing optical interferometer having a dual use optical element

Patent Kotidis, P A; Woodroffe, J A; Rostler, P S

A system for nondestructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical ormore »« less
Method and apparatus for measuring surface movement of an object using a polarizing interferometer

Patent Schultz, T J; Kotidis, P A; Woodroffe, J A; ...

A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical ormore »« less
Dual-domain point diffraction interferometer

Patent Naulleau, Patrick P [5239 Miles Ave., Apt. A, Oakland, CA 94618]; Goldberg, Kenneth Alan [1195 Keeler Ave., Berkeley, CA 94708]

A hybrid spatial/temporal-domain point diffraction interferometer (referred to as the dual-domain PS/PDI) that is capable of suppressing the scattered-reference-light noise that hinders the conventional PS/PDI is provided. The dual-domain PS/PDI combines the separate noise-suppression capabilities of the widely-used phase-shifting and Fourier-transform fringe pattern analysis methods. The dual-domain PS/PDI relies on both a more restrictive implementation of the image plane PS/PDI mask and a new analysis method to be applied to the interferograms generated and recorded by the modified PS/PDI. The more restrictive PS/PDI mask guarantees the elimination of spatial-frequency crosstalk between the signal and the scattered-light noise arising from scattered-reference-lightmore »« less
Full Text Available
Polarizing optical interferometer having a dual use optical element

Patent Kotidis, Petros A [Waban, MA]; Woodroffe, Jaime A [North Reading, MA]; Rostler, Peter S [Newton, MA]

A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical ormore »« less
Full Text Available
Dual-domain lateral shearing interferometer

Patent Naulleau, Patrick P.; Goldberg, Kenneth Alan

The phase-shifting point diffraction interferometer (PS/PDI) was developed to address the problem of at-wavelength metrology of extreme ultraviolet (EUV) optical systems. Although extremely accurate, the fact that the PS/PDI is limited to use with coherent EUV sources, such as undulator radiation, is a drawback for its widespread use. An alternative to the PS/PDI, with relaxed coherence requirements, is lateral shearing interferometry (LSI). The use of a cross-grating, carrier-frequency configuration to characterize a large-field 4.times.-reduction EUV lithography optic is demonstrated. The results obtained are directly compared with PS/PDI measurements. A defocused implementation of the lateral shearing interferometer in which an image-planemore »« less
Full Text Available

Similar Records