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Title: Dual surface interferometer

Abstract

A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.

Inventors:
;
Issue Date:
OSTI Identifier:
6086986
Assignee:
TIC; EDB-82-003775
DOE Contract Number:  
W-7405-ENG-26
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; INTERFEROMETERS; DESIGN; OPERATION; CONTROL SYSTEMS; LASERS; MACHINING; MEASURING INSTRUMENTS; 420200* - Engineering- Facilities, Equipment, & Techniques

Citation Formats

Pardue, R.M., and Williams, R.R. Dual surface interferometer. United States: N. p., 1980. Web.
Pardue, R.M., & Williams, R.R. Dual surface interferometer. United States.
Pardue, R.M., and Williams, R.R. Fri . "Dual surface interferometer". United States.
@article{osti_6086986,
title = {Dual surface interferometer},
author = {Pardue, R.M. and Williams, R.R.},
abstractNote = {A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarterwave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1980},
month = {9}
}