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Title: Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists

Abstract

Photoresist techniques and compositions are provided employing curcumin as an absorptive dye for the purpose of reducing linewidth non-uniformity caused by scattered and reflective light from the substrate-resist interface. The photoresist compositions containing curcumin as the absorptive dye are used in the production of microelectronic circuitry by both single layer and multilayer photoresist techniques.

Inventors:
Issue Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (USA)
OSTI Identifier:
6086684
Application Number:
ON: DE88000844
Assignee:
Dept. of Energy SNL; EDB-87-171407
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE; CURCUMIN; ABSORPTION; LINE WIDTHS; CONTROL; MICROELECTRONICS; RESINS; SPIN-ON COATING; BLEACHING; ETCHING; LAYERS; LIGHT SCATTERING; PHOTOSENSITIVITY; REFLECTION; RESOLUTION; ULTRAVIOLET RADIATION; AROMATICS; DEPOSITION; DYES; ELECTROMAGNETIC RADIATION; ETHERS; HYDROXY COMPOUNDS; KETONES; ORGANIC COMPOUNDS; ORGANIC OXYGEN COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; PHENOLS; POLYMERS; POLYPHENOLS; RADIATIONS; SCATTERING; SENSITIVITY; SURFACE COATING; SURFACE FINISHING; 420800* - Engineering- Electronic Circuits & Devices- (-1989); 360603 - Materials- Properties; 360601 - Other Materials- Preparation & Manufacture

Citation Formats

Renschler, C.L. Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists. United States: N. p., 1986. Web.
Renschler, C.L. Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists. United States.
Renschler, C.L. Tue . "Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists". United States.
@article{osti_6086684,
title = {Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists},
author = {Renschler, C.L.},
abstractNote = {Photoresist techniques and compositions are provided employing curcumin as an absorptive dye for the purpose of reducing linewidth non-uniformity caused by scattered and reflective light from the substrate-resist interface. The photoresist compositions containing curcumin as the absorptive dye are used in the production of microelectronic circuitry by both single layer and multilayer photoresist techniques.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {11}
}