Preparation of a semiconductor thin film
Abstract
A process is disclosed for the preparation of a semiconductor film. The process comprises depositing nanoparticles of a semiconductor material onto a substrate whose surface temperature during nanoparticle deposition thereon is sufficient to cause substantially simultaneous fusion of the nanoparticles to thereby coalesce with each other and effectuate film growth.
- Inventors:
- Issue Date:
- Research Org.:
- Midwest Research Institute, Kansas City, MO (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 570435
- Patent Number(s):
- 5711803
- Application Number:
- PAN: 8-536,348
- Assignee:
- Midwest Research Inst., Kansas City, MO (United States)
- DOE Contract Number:
- AC36-83CH10093
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 27 Jan 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 14 SOLAR ENERGY; SEMICONDUCTOR MATERIALS; FABRICATION; SUBSTRATES; CRYSTAL GROWTH; THIN FILMS
Citation Formats
Pehnt, M, Schulz, D L, Curtis, C J, and Ginley, D S. Preparation of a semiconductor thin film. United States: N. p., 1998.
Web.
Pehnt, M, Schulz, D L, Curtis, C J, & Ginley, D S. Preparation of a semiconductor thin film. United States.
Pehnt, M, Schulz, D L, Curtis, C J, and Ginley, D S. Tue .
"Preparation of a semiconductor thin film". United States.
@article{osti_570435,
title = {Preparation of a semiconductor thin film},
author = {Pehnt, M and Schulz, D L and Curtis, C J and Ginley, D S},
abstractNote = {A process is disclosed for the preparation of a semiconductor film. The process comprises depositing nanoparticles of a semiconductor material onto a substrate whose surface temperature during nanoparticle deposition thereon is sufficient to cause substantially simultaneous fusion of the nanoparticles to thereby coalesce with each other and effectuate film growth.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
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