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Title: Ultrahigh vacuum focused ion beam micromill and articles therefrom

Abstract

An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.

Inventors:
;
Issue Date:
Research Org.:
Univ. of California (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
570403
Patent Number(s):
5,721,687
Application Number:
PAN: 8-382,345
Assignee:
Univ. of California, Office of Technology Transfer, Alameda, CA (United States)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 24 Feb 1998
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 99 MATHEMATICS, COMPUTERS, INFORMATION SCIENCE, MANAGEMENT, LAW, MISCELLANEOUS; MEMORY DEVICES; MILLING MACHINES; ION BEAMS; MILLING; VACUUM SYSTEMS; MINIATURIZATION

Citation Formats

Lamartine, B C, and Stutz, R A. Ultrahigh vacuum focused ion beam micromill and articles therefrom. United States: N. p., 1998. Web.
Lamartine, B C, & Stutz, R A. Ultrahigh vacuum focused ion beam micromill and articles therefrom. United States.
Lamartine, B C, and Stutz, R A. Tue . "Ultrahigh vacuum focused ion beam micromill and articles therefrom". United States.
@article{osti_570403,
title = {Ultrahigh vacuum focused ion beam micromill and articles therefrom},
author = {Lamartine, B C and Stutz, R A},
abstractNote = {An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {2}
}