Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
Abstract
A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.
- Inventors:
- Issue Date:
- Research Org.:
- Solar Energy Research Inst. (SERI), Golden, CO (United States)
- OSTI Identifier:
- 5656825
- Application Number:
- ON: DE86013707
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Resource Relation:
- Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; MATERIALS TESTING; EQUIPMENT; TESTING; 420500* - Engineering- Materials Testing
Citation Formats
Kazmerski, L L. Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices. United States: N. p., 1985.
Web.
Kazmerski, L L. Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices. United States.
Kazmerski, L L. Tue .
"Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices". United States.
@article{osti_5656825,
title = {Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices},
author = {Kazmerski, L L},
abstractNote = {A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 30 00:00:00 EDT 1985},
month = {Tue Apr 30 00:00:00 EDT 1985}
}
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