Optical caliper with compensation for specimen deflection and method
Abstract
An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors. 2 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 563701
- Patent Number(s):
- 5696589
- Application Number:
- PAN: 8-650,674
- Assignee:
- Lockheed Martin Energy Systems, Inc., Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 9 Dec 1997
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; OPTICAL EQUIPMENT; MEASURING INSTRUMENTS; THICKNESS; SURFACE PROPERTIES; DATA PROCESSING; MEASURING METHODS
Citation Formats
Bernacki, B E. Optical caliper with compensation for specimen deflection and method. United States: N. p., 1997.
Web.
Bernacki, B E. Optical caliper with compensation for specimen deflection and method. United States.
Bernacki, B E. Tue .
"Optical caliper with compensation for specimen deflection and method". United States.
@article{osti_563701,
title = {Optical caliper with compensation for specimen deflection and method},
author = {Bernacki, B E},
abstractNote = {An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors. 2 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 09 00:00:00 EST 1997},
month = {Tue Dec 09 00:00:00 EST 1997}
}
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