Optical caliper with compensation for specimen deflection and method

Bernacki, B E

Title: Optical caliper with compensation for specimen deflection and method

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Abstract

An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors. 2 figs.

Inventors:: Bernacki, B E

Issue Date:: 1997-12-09

Research Org.:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE, Washington, DC (United States)

OSTI Identifier:: 563701

Patent Number(s):: 5696589

Application Number:: PAN: 8-650,674

Assignee:: Lockheed Martin Energy Systems, Inc., Oak Ridge, TN (United States)

DOE Contract Number:: AC05-84OR21400

Resource Type:: Patent

Resource Relation:: Other Information: PBD: 9 Dec 1997

Country of Publication:: United States

Language:: English

Subject:: 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; OPTICAL EQUIPMENT; MEASURING INSTRUMENTS; THICKNESS; SURFACE PROPERTIES; DATA PROCESSING; MEASURING METHODS

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                    Bernacki, B E. Optical caliper with compensation for specimen deflection and method.  United States: N. p., 1997. 
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                    Bernacki, B E. Optical caliper with compensation for specimen deflection and method.  United States.

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                    Bernacki, B E. Tue .  
        "Optical caliper with compensation for specimen deflection and method".  United States.

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@article{osti_563701,

  title        = {Optical caliper with compensation for specimen deflection and method},

  author       = {Bernacki, B E},

  abstractNote = {An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors. 2 figs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1997},

  month        = {12}

}

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