Process for selectively patterning epitaxial film growth on a semiconductor substrate
Abstract
Disclosed is a process for selectively patterning epitaxial film growth on a semiconductor substrate. The process includes forming a masking member on the surface of the substrate, the masking member having at least two layers including a first layer disposed on the substrate and the second layer covering the first layer. A window is then opened in a selected portion of the second layer by removing that portion to expose the first layer thereunder. The first layer is then subjected to an etchant introduced through the window to dissolve the first layer a sufficient amount to expose the substrate surface directly beneath the window, the first layer being adapted to preferentially dissolve at a substantially greater rate than the second layer so as to create an overhanging ledge portion with the second layer by undercutting the edges thereof adjacent the window. The epitaxial film is then deposited on the exposed substrate surface directly beneath the window. Finally, an etchant is introduced through the window to dissolve the remainder of the first layer so as to lift-off the second layer and materials deposited thereon to fully expose the balance of the substrate surface.
- Inventors:
- Issue Date:
- Research Org.:
- Solar Energy Research Inst. (SERI), Golden, CO (United States)
- OSTI Identifier:
- 5421003
- Application Number:
- ON: DE85017733
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY; 36 MATERIALS SCIENCE; GALLIUM ARSENIDES; EPITAXY; GERMANIUM; SOLAR CELLS; FABRICATION; DEPOSITION; SEMICONDUCTOR MATERIALS; SILICON; SUBSTRATES; ARSENIC COMPOUNDS; ARSENIDES; DIRECT ENERGY CONVERTERS; ELEMENTS; EQUIPMENT; GALLIUM COMPOUNDS; MATERIALS; METALS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PNICTIDES; SEMIMETALS; SOLAR EQUIPMENT; 140501* - Solar Energy Conversion- Photovoltaic Conversion; 360600 - Other Materials
Citation Formats
Sheldon, P, and Hayes, R E. Process for selectively patterning epitaxial film growth on a semiconductor substrate. United States: N. p., 1984.
Web.
Sheldon, P, & Hayes, R E. Process for selectively patterning epitaxial film growth on a semiconductor substrate. United States.
Sheldon, P, and Hayes, R E. Tue .
"Process for selectively patterning epitaxial film growth on a semiconductor substrate". United States.
@article{osti_5421003,
title = {Process for selectively patterning epitaxial film growth on a semiconductor substrate},
author = {Sheldon, P and Hayes, R E},
abstractNote = {Disclosed is a process for selectively patterning epitaxial film growth on a semiconductor substrate. The process includes forming a masking member on the surface of the substrate, the masking member having at least two layers including a first layer disposed on the substrate and the second layer covering the first layer. A window is then opened in a selected portion of the second layer by removing that portion to expose the first layer thereunder. The first layer is then subjected to an etchant introduced through the window to dissolve the first layer a sufficient amount to expose the substrate surface directly beneath the window, the first layer being adapted to preferentially dissolve at a substantially greater rate than the second layer so as to create an overhanging ledge portion with the second layer by undercutting the edges thereof adjacent the window. The epitaxial film is then deposited on the exposed substrate surface directly beneath the window. Finally, an etchant is introduced through the window to dissolve the remainder of the first layer so as to lift-off the second layer and materials deposited thereon to fully expose the balance of the substrate surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 04 00:00:00 EST 1984},
month = {Tue Dec 04 00:00:00 EST 1984}
}