Chemical vapor deposition of sialon
Abstract
A laminated composite and a method for forming the composite by chemical vapor deposition are described. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200/sup 0/C; and impinging a gas containing N/sub 2/, SiCl/sub 4/, and AlCl/sub 3/ on the surface.
- Inventors:
- OSTI Identifier:
- 5417810
- Assignee:
- TIC; ERA-05-024425; EDB-80-067018
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; ALUMINIUM CHLORIDES; SURFACE COATING; NITRIDES; REFRACTORY METALS; BONDING; ROTORS; POROSITY; SORPTIVE PROPERTIES; SILICON CHLORIDES; SILICON NITRIDES; CERAMICS; CHEMICAL VAPOR DEPOSITION; GRAPHITE; LAYERS; REFRACTORIES; ALUMINIUM COMPOUNDS; CARBON; CHEMICAL COATING; CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; ELEMENTS; FABRICATION; HALIDES; HALOGEN COMPOUNDS; JOINING; METALS; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; SILICON COMPOUNDS; SURFACE PROPERTIES; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360204 - Ceramics, Cermets, & Refractories- Physical Properties
Citation Formats
Landingham, R L, and Casey, A W. Chemical vapor deposition of sialon. United States: N. p.,
Web.
Landingham, R L, & Casey, A W. Chemical vapor deposition of sialon. United States.
Landingham, R L, and Casey, A W. .
"Chemical vapor deposition of sialon". United States.
@article{osti_5417810,
title = {Chemical vapor deposition of sialon},
author = {Landingham, R L and Casey, A W},
abstractNote = {A laminated composite and a method for forming the composite by chemical vapor deposition are described. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200/sup 0/C; and impinging a gas containing N/sub 2/, SiCl/sub 4/, and AlCl/sub 3/ on the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {},
month = {}
}
Search for the full text at the U.S. Patent and Trademark Office
Note: You will be redirected to the USPTO site, which may require a pop-up blocker to be deactivated to view the patent. If so, you will need to manually turn off your browser's pop-up blocker, typically found within the browser settings. (See DOE Patents FAQs for more information.)
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.