Sputter coating of microspherical substrates by levitation
Abstract
Microspheres are substantially uniformly coated with metals or nonmetals by simltaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure comprising a parallel array of upwardly projecting individual gas outlets is machined out to form a dimple. Glass microballoons,, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.
- Inventors:
- OSTI Identifier:
- 5357269
- Assignee:
- TIC; ERA-05-030339; EDB-80-088429
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; MICROSPHERES; SURFACE COATING; LASER TARGETS; LEVITATION; SPUTTERING; DEPOSITION; TARGETS; 060201* - Fusion Fuels- Fabrication & Testing- (1980-1987)
Citation Formats
Lowe, A T, and Hosford, C D. Sputter coating of microspherical substrates by levitation. United States: N. p.,
Web.
Lowe, A T, & Hosford, C D. Sputter coating of microspherical substrates by levitation. United States.
Lowe, A T, and Hosford, C D. .
"Sputter coating of microspherical substrates by levitation". United States.
@article{osti_5357269,
title = {Sputter coating of microspherical substrates by levitation},
author = {Lowe, A T and Hosford, C D},
abstractNote = {Microspheres are substantially uniformly coated with metals or nonmetals by simltaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure comprising a parallel array of upwardly projecting individual gas outlets is machined out to form a dimple. Glass microballoons,, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {},
month = {}
}
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