High efficiency direct detection of ions from resonance ionization of sputtered atoms
Abstract
A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 5271958
- Application Number:
- ON: DE85017755
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; QUANTITATIVE CHEMICAL ANALYSIS; RESONANCE IONIZATION MASS SPECTROSCOPY; SPUTTERING; SURFACES; DESIGN; PHOTOIONIZATION; CHEMICAL ANALYSIS; IONIZATION; MASS SPECTROSCOPY; SPECTROSCOPY; 440300* - Miscellaneous Instruments- (-1989)
Citation Formats
Gruen, D M, Pellin, M J, and Young, C E. High efficiency direct detection of ions from resonance ionization of sputtered atoms. United States: N. p., 1985.
Web.
Gruen, D M, Pellin, M J, & Young, C E. High efficiency direct detection of ions from resonance ionization of sputtered atoms. United States.
Gruen, D M, Pellin, M J, and Young, C E. Wed .
"High efficiency direct detection of ions from resonance ionization of sputtered atoms". United States.
@article{osti_5271958,
title = {High efficiency direct detection of ions from resonance ionization of sputtered atoms},
author = {Gruen, D M and Pellin, M J and Young, C E},
abstractNote = {A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}