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Title: High efficiency direct detection of ions from resonance ionization of sputtered atoms

Abstract

A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.

Inventors:
; ;
Issue Date:
Research Org.:
Argonne National Lab., IL (USA)
OSTI Identifier:
5271958
Application Number:
ON: DE85017755
Assignee:
Dept. of Energy EDB-85-149166
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Patent
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; QUANTITATIVE CHEMICAL ANALYSIS; RESONANCE IONIZATION MASS SPECTROSCOPY; SPUTTERING; SURFACES; DESIGN; PHOTOIONIZATION; CHEMICAL ANALYSIS; IONIZATION; MASS SPECTROSCOPY; SPECTROSCOPY; 440300* - Miscellaneous Instruments- (-1989)

Citation Formats

Gruen, D.M., Pellin, M.J., and Young, C.E. High efficiency direct detection of ions from resonance ionization of sputtered atoms. United States: N. p., 1985. Web.
Gruen, D.M., Pellin, M.J., & Young, C.E. High efficiency direct detection of ions from resonance ionization of sputtered atoms. United States.
Gruen, D.M., Pellin, M.J., and Young, C.E. Wed . "High efficiency direct detection of ions from resonance ionization of sputtered atoms". United States.
@article{osti_5271958,
title = {High efficiency direct detection of ions from resonance ionization of sputtered atoms},
author = {Gruen, D.M. and Pellin, M.J. and Young, C.E.},
abstractNote = {A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}