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Title: Ion source based on the cathodic arc

A cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated, is described. An array of electrically isolated rings positioned in the source serves the dual purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles. 3 figures.
Inventors:
;
Issue Date:
OSTI Identifier:
5239092
Assignee:
Dept. of Energy, Washington, DC () PTO; EDB-94-065905
Patent Number(s):
US 5282944; A
Application Number:
PPN: US 7-921779
Contract Number:
W-7405-ENG-48
Resource Relation:
Patent File Date: 30 Jul 1992
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Ta; ION SOURCES; DESIGN; BAFFLES; ELECTRIC FIELDS; ELECTRICAL INSULATION; CONTROL EQUIPMENT; EQUIPMENT; FLOW REGULATORS; 661220* - Particle Beam Production & Handling; Targets- (1992-)