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Title: Aerosol chemical vapor deposition of metal oxide films

Abstract

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said substrate.

Inventors:
;
Issue Date:
OSTI Identifier:
5226424
Patent Number(s):
5278138 A
Application Number:
PPN: US 7-774748
Assignee:
PTO; EDB-94-064381
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Patent File Date: 11 Oct 1991
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; GALLIUM OXIDES; VAPOR DEPOSITED COATINGS; LANTHANUM OXIDES; MAGNESIUM OXIDES; OXIDES; CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SILICON; ZIRCONIUM OXIDES; COMPOSITE MATERIALS; FABRICATION; ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; COATINGS; CORUNDUM; DEPOSITION; ELEMENTS; GALLIUM COMPOUNDS; LANTHANUM COMPOUNDS; MAGNESIUM COMPOUNDS; MATERIALS; MINERALS; OXIDE MINERALS; OXYGEN COMPOUNDS; RARE EARTH COMPOUNDS; SEMIMETALS; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS; 360601* - Other Materials- Preparation & Manufacture

Citation Formats

Ott, K.C., and Kodas, T.T. Aerosol chemical vapor deposition of metal oxide films. United States: N. p., 1994. Web.
Ott, K.C., & Kodas, T.T. Aerosol chemical vapor deposition of metal oxide films. United States.
Ott, K.C., and Kodas, T.T. Tue . "Aerosol chemical vapor deposition of metal oxide films". United States.
@article{osti_5226424,
title = {Aerosol chemical vapor deposition of metal oxide films},
author = {Ott, K.C. and Kodas, T.T.},
abstractNote = {A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}