Filtered cathodic arc source
Abstract
A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge is described. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45[degree] to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles. 3 figures.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 5173594
- Patent Number(s):
- 5279723
- Application Number:
- PPN: US 7-921780
- Assignee:
- Dept. of Energy, Washington, DC ()
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 30 Jul 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Ta; ION SOURCES; DESIGN; BAFFLES; ELECTRIC ARCS; PARTICLE SIZE; CONTROL EQUIPMENT; CURRENTS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; EQUIPMENT; FLOW REGULATORS; SIZE; 661220* - Particle Beam Production & Handling; Targets- (1992-)
Citation Formats
Falabella, S, and Sanders, D M. Filtered cathodic arc source. United States: N. p., 1994.
Web.
Falabella, S, & Sanders, D M. Filtered cathodic arc source. United States.
Falabella, S, and Sanders, D M. Tue .
"Filtered cathodic arc source". United States.
@article{osti_5173594,
title = {Filtered cathodic arc source},
author = {Falabella, S and Sanders, D M},
abstractNote = {A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge is described. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45[degree] to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles. 3 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 18 00:00:00 EST 1994},
month = {Tue Jan 18 00:00:00 EST 1994}
}