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Title: Filtered cathodic arc source

Abstract

A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge is described. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45[degree] to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles. 3 figures.

Inventors:
;
Issue Date:
OSTI Identifier:
5173594
Patent Number(s):
5279723 A
Application Number:
PPN: US 7-921780
Assignee:
Dept. of Energy, Washington, DC () PTO; EDB-94-065906
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Patent File Date: 30 Jul 1992
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Ta; ION SOURCES; DESIGN; BAFFLES; ELECTRIC ARCS; PARTICLE SIZE; CONTROL EQUIPMENT; CURRENTS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; EQUIPMENT; FLOW REGULATORS; SIZE; 661220* - Particle Beam Production & Handling; Targets- (1992-)

Citation Formats

Falabella, S., and Sanders, D.M. Filtered cathodic arc source. United States: N. p., 1994. Web.
Falabella, S., & Sanders, D.M. Filtered cathodic arc source. United States.
Falabella, S., and Sanders, D.M. Tue . "Filtered cathodic arc source". United States.
@article{osti_5173594,
title = {Filtered cathodic arc source},
author = {Falabella, S. and Sanders, D.M.},
abstractNote = {A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge is described. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45[degree] to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles. 3 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}