Microelectronic superconducting crossover and coil
Abstract
A microelectronic component comprising a crossover is provided comprising a substrate, a first high T[sub c] superconductor thin film, a second insulating thin film comprising SrTiO[sub 3]; and a third high T[sub c] superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions. 13 figures.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 5172018
- Patent Number(s):
- 5291035
- Application Number:
- PPN: US 8-033059
- Assignee:
- Univ. of California, Oakland, CA ()
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10 Mar 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; SUPERCONDUCTING DEVICES; FABRICATION; HIGH-TC SUPERCONDUCTORS; MICROELECTRONICS; STRONTIUM OXIDES; TITANIUM OXIDES; ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; OXIDES; OXYGEN COMPOUNDS; STRONTIUM COMPOUNDS; SUPERCONDUCTORS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 665412* - Superconducting Devices- (1992-)
Citation Formats
Wellstood, F C, Kingston, J J, and Clarke, J. Microelectronic superconducting crossover and coil. United States: N. p., 1994.
Web.
Wellstood, F C, Kingston, J J, & Clarke, J. Microelectronic superconducting crossover and coil. United States.
Wellstood, F C, Kingston, J J, and Clarke, J. Tue .
"Microelectronic superconducting crossover and coil". United States.
@article{osti_5172018,
title = {Microelectronic superconducting crossover and coil},
author = {Wellstood, F C and Kingston, J J and Clarke, J},
abstractNote = {A microelectronic component comprising a crossover is provided comprising a substrate, a first high T[sub c] superconductor thin film, a second insulating thin film comprising SrTiO[sub 3]; and a third high T[sub c] superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions. 13 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {3}
}
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