High quality oxide films on substrates
Abstract
A method is described for providing an oxide film of a material on the surface of a substrate using a reactive deposition of the material onto the substrate surface in the presence of a solid or liquid layer of an oxidizing gas. The oxidizing gas is provided on the substrate surface in an amount sufficient to dissipate the latent heat of condensation occurring during deposition as well as creating a favorable oxidizing environment for the material. 4 figures.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 5159237
- Patent Number(s):
- 5282903
- Application Number:
- PPN: US 7-974455
- Assignee:
- Associated Universities, Inc., Washington, DC ()
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 12 Nov 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; OXIDES; DEPOSITION; HEAT LOSSES; OXIDIZERS; SUBSTRATES; CHALCOGENIDES; ENERGY LOSSES; LOSSES; OXYGEN COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication
Citation Formats
Ruckman, M W, Strongin, M, and Gao, Y L. High quality oxide films on substrates. United States: N. p., 1994.
Web.
Ruckman, M W, Strongin, M, & Gao, Y L. High quality oxide films on substrates. United States.
Ruckman, M W, Strongin, M, and Gao, Y L. Tue .
"High quality oxide films on substrates". United States.
@article{osti_5159237,
title = {High quality oxide films on substrates},
author = {Ruckman, M W and Strongin, M and Gao, Y L},
abstractNote = {A method is described for providing an oxide film of a material on the surface of a substrate using a reactive deposition of the material onto the substrate surface in the presence of a solid or liquid layer of an oxidizing gas. The oxidizing gas is provided on the substrate surface in an amount sufficient to dissipate the latent heat of condensation occurring during deposition as well as creating a favorable oxidizing environment for the material. 4 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {2}
}
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