ECR apparatus with magnetic coil for plasma refractive index control
Abstract
The present invention describes a technique to control the radial profile of microwave power in an ECR plasma discharge. In order to provide for a uniform plasma density to a specimen, uniform energy absorption by the plasma is desired. By controlling the radial profile of the microwave power transmitted through the microwave window of a reactor, the profile of the transmitted energy to the plasma can be controlled in order to have uniform energy absorption by the plasma. An advantage of controlling the profile using the window transmission characteristics is that variations to the radial profile of microwave power can be made without changing the microwave coupler or reactor design. 9 figures.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 5006252
- Patent Number(s):
- 5306985
- Application Number:
- CNN: ERD-89-876; PPN: US 7-916317
- Assignee:
- Sematech, Inc., Austin, TX (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 17 Jul 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Fu; PLASMA; REFRACTIVE INDEX; THERMONUCLEAR REACTORS; MICROWAVE EQUIPMENT; CONTROL; ENERGY ABSORPTION; ENERGY TRANSFER; WINDOWS; ABSORPTION; ELECTRONIC EQUIPMENT; EQUIPMENT; OPENINGS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; SORPTION; 700460* - Fusion Technology- Heating & Fueling Systems; Fuels- (1992)
Citation Formats
Berry, L A. ECR apparatus with magnetic coil for plasma refractive index control. United States: N. p., 1994.
Web.
Berry, L A. ECR apparatus with magnetic coil for plasma refractive index control. United States.
Berry, L A. Tue .
"ECR apparatus with magnetic coil for plasma refractive index control". United States.
@article{osti_5006252,
title = {ECR apparatus with magnetic coil for plasma refractive index control},
author = {Berry, L A},
abstractNote = {The present invention describes a technique to control the radial profile of microwave power in an ECR plasma discharge. In order to provide for a uniform plasma density to a specimen, uniform energy absorption by the plasma is desired. By controlling the radial profile of the microwave power transmitted through the microwave window of a reactor, the profile of the transmitted energy to the plasma can be controlled in order to have uniform energy absorption by the plasma. An advantage of controlling the profile using the window transmission characteristics is that variations to the radial profile of microwave power can be made without changing the microwave coupler or reactor design. 9 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 26 00:00:00 EDT 1994},
month = {Tue Apr 26 00:00:00 EDT 1994}
}
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