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Title: APPARATUS FOR VACUUM DEPOSITION ON A NEGATIVELY BIASED SUBSTRATE.

Inventors:
; ;
Issue Date:
Research Org.:
Originating Research Org. not identified
OSTI Identifier:
4826481
Patent Number(s):
3428546
Assignee:
(to United States Atomic Energy Commission). DTIE; NSA-23-014101
NSA Number:
NSA-23-014101
Resource Type:
Patent
Resource Relation:
Other Information: Orig. Receipt Date: 31-DEC-69
Country of Publication:
United States
Language:
English
Subject:
N26400* -Instrumentation-Miscellaneous Instruments & Components; DEPOSITS; FILMS; IONIZATION; IONS; FILMS/deposition on negatively biased substrate, apparatus for vacuum

Citation Formats

Baum, G.A., Beno, R.L., and Van Vorous, T. APPARATUS FOR VACUUM DEPOSITION ON A NEGATIVELY BIASED SUBSTRATE.. United States: N. p., 1969. Web.
Baum, G.A., Beno, R.L., & Van Vorous, T. APPARATUS FOR VACUUM DEPOSITION ON A NEGATIVELY BIASED SUBSTRATE.. United States.
Baum, G.A., Beno, R.L., and Van Vorous, T. Wed . "APPARATUS FOR VACUUM DEPOSITION ON A NEGATIVELY BIASED SUBSTRATE.". United States.
@article{osti_4826481,
title = {APPARATUS FOR VACUUM DEPOSITION ON A NEGATIVELY BIASED SUBSTRATE.},
author = {Baum, G.A. and Beno, R.L. and Van Vorous, T.},
abstractNote = {},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1969},
month = {1}
}