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Title: MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE

Abstract

A vacuum pump is designed which operates by ionizing incoming air and by withdrawing the ions from the system by means of electrical fields. The apparatus comprises a cylindrical housing communicable with the vessel to be evacuated and having a thin wall section in one end. Suitable coils provide a longitudinal magnetic field within the cylinder. A broad cathode and an anode structure is provided to establish a plurality of adjacent electron beams which are parallel to the cylinder axis. Electron reflector means are provided so that each of the beams constitutes a PIG or reflex discharge. Such structure provides a large region in which incoming gas molecules may be ionized by electron bombardment. A charged electrode assembly accelerates the ions through the thin window, thereby removing the gas from the system. The invention may also be utilized as a highly efficient ion source. (AEC)

Inventors:
Issue Date:
OSTI Identifier:
4816261
Patent Number(s):
3022933
Assignee:
U.S. Atomic Energy Commission
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
NSA Number:
NSA-16-008858
Resource Type:
Patent
Resource Relation:
Other Information: Orig. Receipt Date: 31-DEC-62
Country of Publication:
United States
Language:
English
Subject:
ENGINEERING AND EQUIPMENT; AIR; ANODES; CATHODES; COILS; EFFICIENCY; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRONS; ION PUMPS; IONIZATION; MOLECULES; PUMPS; VACUUM; VESSELS; WINDOWS

Citation Formats

Ellis, R E. MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE. United States: N. p., 1962. Web.
Ellis, R E. MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE. United States.
Ellis, R E. Tue . "MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE". United States.
@article{osti_4816261,
title = {MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE},
author = {Ellis, R E},
abstractNote = {A vacuum pump is designed which operates by ionizing incoming air and by withdrawing the ions from the system by means of electrical fields. The apparatus comprises a cylindrical housing communicable with the vessel to be evacuated and having a thin wall section in one end. Suitable coils provide a longitudinal magnetic field within the cylinder. A broad cathode and an anode structure is provided to establish a plurality of adjacent electron beams which are parallel to the cylinder axis. Electron reflector means are provided so that each of the beams constitutes a PIG or reflex discharge. Such structure provides a large region in which incoming gas molecules may be ionized by electron bombardment. A charged electrode assembly accelerates the ions through the thin window, thereby removing the gas from the system. The invention may also be utilized as a highly efficient ion source. (AEC)},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1962},
month = {2}
}