MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE
Abstract
A vacuum pump is designed which operates by ionizing incoming air and by withdrawing the ions from the system by means of electrical fields. The apparatus comprises a cylindrical housing communicable with the vessel to be evacuated and having a thin wall section in one end. Suitable coils provide a longitudinal magnetic field within the cylinder. A broad cathode and an anode structure is provided to establish a plurality of adjacent electron beams which are parallel to the cylinder axis. Electron reflector means are provided so that each of the beams constitutes a PIG or reflex discharge. Such structure provides a large region in which incoming gas molecules may be ionized by electron bombardment. A charged electrode assembly accelerates the ions through the thin window, thereby removing the gas from the system. The invention may also be utilized as a highly efficient ion source. (AEC)
- Inventors:
- Issue Date:
- Research Org.:
- Originating Research Org. not identified
- OSTI Identifier:
- 4816261
- Patent Number(s):
- 3022933
- Assignee:
- U.S. Atomic Energy Commission
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- NSA Number:
- NSA-16-008858
- Resource Type:
- Patent
- Resource Relation:
- Other Information: Orig. Receipt Date: 31-DEC-62
- Country of Publication:
- United States
- Language:
- English
- Subject:
- ENGINEERING AND EQUIPMENT; AIR; ANODES; CATHODES; COILS; EFFICIENCY; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRONS; ION PUMPS; IONIZATION; MOLECULES; PUMPS; VACUUM; VESSELS; WINDOWS
Citation Formats
Ellis, R E. MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE. United States: N. p., 1962.
Web.
Ellis, R E. MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE. United States.
Ellis, R E. Tue .
"MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE". United States.
@article{osti_4816261,
title = {MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE},
author = {Ellis, R E},
abstractNote = {A vacuum pump is designed which operates by ionizing incoming air and by withdrawing the ions from the system by means of electrical fields. The apparatus comprises a cylindrical housing communicable with the vessel to be evacuated and having a thin wall section in one end. Suitable coils provide a longitudinal magnetic field within the cylinder. A broad cathode and an anode structure is provided to establish a plurality of adjacent electron beams which are parallel to the cylinder axis. Electron reflector means are provided so that each of the beams constitutes a PIG or reflex discharge. Such structure provides a large region in which incoming gas molecules may be ionized by electron bombardment. A charged electrode assembly accelerates the ions through the thin window, thereby removing the gas from the system. The invention may also be utilized as a highly efficient ion source. (AEC)},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1962},
month = {2}
}