Josephson junction

Title: Josephson junction

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A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.

Inventors:: Wendt, J.R.; Plut, T.A.; Martens, J.S.

Issue Date:: 1995-05-02

OSTI Identifier:: 46314

Assignee:: Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 665412; PA: EDB-95:080265; SN: 95001384515

Patent Number(s):: US 5,411,937/A/

Application Number:: PAN: 8-062,672

Contract Number:: AC04-76DP00789

Resource Relation:: Other Information: PBD: 2 May 1995

Research Org:: AT&T Corporation

Country of Publication:: United States

Language:: English

Subject:: 66 PHYSICS; JOSEPHSON JUNCTIONS; FABRICATION; ETCHING; HIGH-TC SUPERCONDUCTORS; MASKING

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