Josephson junction
Abstract
A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.
- Inventors:
- Issue Date:
- Research Org.:
- AT&T Corporation
- OSTI Identifier:
- 46314
- Patent Number(s):
- 5,411,937
- Application Number:
- PAN: 8-062,672
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 2 May 1995
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 66 PHYSICS; JOSEPHSON JUNCTIONS; FABRICATION; ETCHING; HIGH-TC SUPERCONDUCTORS; MASKING
Citation Formats
Wendt, J R, Plut, T A, and Martens, J S. Josephson junction. United States: N. p., 1995.
Web.
Wendt, J R, Plut, T A, & Martens, J S. Josephson junction. United States.
Wendt, J R, Plut, T A, and Martens, J S. Tue .
"Josephson junction". United States.
@article{osti_46314,
title = {Josephson junction},
author = {Wendt, J R and Plut, T A and Martens, J S},
abstractNote = {A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {5}
}
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