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Title: Josephson junction

Abstract

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.

Inventors:
; ;
Issue Date:
Research Org.:
AT&T Corporation
OSTI Identifier:
46314
Patent Number(s):
5,411,937
Application Number:
PAN: 8-062,672
Assignee:
Sandia Corp., Albuquerque, NM (United States)
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 2 May 1995
Country of Publication:
United States
Language:
English
Subject:
66 PHYSICS; JOSEPHSON JUNCTIONS; FABRICATION; ETCHING; HIGH-TC SUPERCONDUCTORS; MASKING

Citation Formats

Wendt, J R, Plut, T A, and Martens, J S. Josephson junction. United States: N. p., 1995. Web.
Wendt, J R, Plut, T A, & Martens, J S. Josephson junction. United States.
Wendt, J R, Plut, T A, and Martens, J S. Tue . "Josephson junction". United States.
@article{osti_46314,
title = {Josephson junction},
author = {Wendt, J R and Plut, T A and Martens, J S},
abstractNote = {A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {5}
}