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Title: Josephson junction

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.
Inventors:
; ;
Issue Date:
OSTI Identifier:
46314
Assignee:
Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 665412; PA: EDB-95:080265; SN: 95001384515
Patent Number(s):
US 5,411,937/A/
Application Number:
PAN: 8-062,672
Contract Number:
AC04-76DP00789
Resource Relation:
Other Information: PBD: 2 May 1995
Research Org:
AT&T Corporation
Country of Publication:
United States
Language:
English
Subject:
66 PHYSICS; JOSEPHSON JUNCTIONS; FABRICATION; ETCHING; HIGH-TC SUPERCONDUCTORS; MASKING