Porcelain-coated antenna for radio-frequency driven plasma source
Abstract
A new porcelain-enamel coated antenna creates a clean plasma for volume or surface-conversion ion sources. The porcelain-enamel coating is hard, electrically insulating, long lasting, non fragile, and resistant to puncture by high energy ions in the plasma. Plasma and ion production using the porcelain enamel coated antenna is uncontaminated with filament or extraneous metal ions because the porcelain does not evaporate and is not sputtered into the plasma during operation. Ion beams produced using the new porcelain-enamel coated antenna are useful in ion implantation, high energy accelerators, negative, positive, or neutral beam applications, fusion, and treatment of chemical or radioactive waste for disposal. For ion implantation, the appropriate species ion beam generated with the inventive antenna will penetrate large or small, irregularly shaped conducting objects with a narrow implantation profile. 8 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- OSTI Identifier:
- 415757
- Patent Number(s):
- 5587226
- Application Number:
- PAN: 8-010,108; TRN: 97:001286
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 24 Dec 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 66 PHYSICS; ANTENNAS; DESIGN; ION SOURCES; PLASMA PRODUCTION; ION BEAMS; BEAM PRODUCTION; USES
Citation Formats
Leung, K N, Wells, R P, and Craven, G E. Porcelain-coated antenna for radio-frequency driven plasma source. United States: N. p., 1996.
Web.
Leung, K N, Wells, R P, & Craven, G E. Porcelain-coated antenna for radio-frequency driven plasma source. United States.
Leung, K N, Wells, R P, and Craven, G E. Tue .
"Porcelain-coated antenna for radio-frequency driven plasma source". United States.
@article{osti_415757,
title = {Porcelain-coated antenna for radio-frequency driven plasma source},
author = {Leung, K N and Wells, R P and Craven, G E},
abstractNote = {A new porcelain-enamel coated antenna creates a clean plasma for volume or surface-conversion ion sources. The porcelain-enamel coating is hard, electrically insulating, long lasting, non fragile, and resistant to puncture by high energy ions in the plasma. Plasma and ion production using the porcelain enamel coated antenna is uncontaminated with filament or extraneous metal ions because the porcelain does not evaporate and is not sputtered into the plasma during operation. Ion beams produced using the new porcelain-enamel coated antenna are useful in ion implantation, high energy accelerators, negative, positive, or neutral beam applications, fusion, and treatment of chemical or radioactive waste for disposal. For ion implantation, the appropriate species ion beam generated with the inventive antenna will penetrate large or small, irregularly shaped conducting objects with a narrow implantation profile. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 24 00:00:00 EST 1996},
month = {Tue Dec 24 00:00:00 EST 1996}
}