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Title: System for monitoring the growth of crystalline films on stationary substrates

A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and convening the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triaxial cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement. 16 figs.
Inventors:
Issue Date:
OSTI Identifier:
415756
Assignee:
Midwest Research Inst., Kansas City, MO (United States) CHO; SCA: 360601; PA: EDB-97:015272; SN: 97001714591
Patent Number(s):
US 5,588,995/A/
Application Number:
PAN: 8-434,181
Contract Number:
AC02-83CH10093
Resource Relation:
Other Information: PBD: 31 Dec 1996
Research Org:
Midwest Research Institute; National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CRYSTAL GROWTH; MONITORING; MONITORS; DESIGN; SEMICONDUCTOR MATERIALS; OPTICAL FILTERS; DATA ACQUISITION SYSTEMS

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