Precision non-contact polishing tool
A non-contact polishing tool is disclosed that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required. 5 figs.
- Issue Date:
- OSTI Identifier:
- 415751
- Assignee:
- Univ. of California, Oakland, CA (United States) PTO; SCA: 320303; PA: EDB-97:014225; SN: 97001714581
- Patent Number(s):
- US 5,591,068/A/
- Application Number:
- PAN: 8-403,035
- Contract Number:
- W-7405-ENG-48
- Resource Relation:
- Other Information: PBD: 7 Jan 1997
- Research Org:
- University of California
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MACHINE TOOLS; DESIGN; OPTICAL SYSTEMS; SLURRIES; SURFACE FINISHING; USES