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Title: Precision non-contact polishing tool

Abstract

A non-contact polishing tool is disclosed that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required. 5 figs.

Inventors:
Issue Date:
Research Org.:
University of California
OSTI Identifier:
415751
Patent Number(s):
5,591,068
Application Number:
PAN: 8-403,035
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 7 Jan 1997
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MACHINE TOOLS; DESIGN; OPTICAL SYSTEMS; SLURRIES; SURFACE FINISHING; USES

Citation Formats

Taylor, J S. Precision non-contact polishing tool. United States: N. p., 1997. Web.
Taylor, J S. Precision non-contact polishing tool. United States.
Taylor, J S. Tue . "Precision non-contact polishing tool". United States.
@article{osti_415751,
title = {Precision non-contact polishing tool},
author = {Taylor, J S},
abstractNote = {A non-contact polishing tool is disclosed that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required. 5 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {1}
}