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Title: Microminiature gas chromatograph

A microminiature gas chromatograph ({mu}GC) comprising a least one silicon wafer, a gas injector, a column, and a detector. The gas injector has a normally closed valve for introducing a mobile phase including a sample gas in a carrier gas. The valve is fully disposed in the silicon wafer(s). The column is a microcapillary in silicon crystal with a stationary phase and is mechanically connected to receive the mobile phase from the gas injector for the molecular separation of compounds in the sample gas. The detector is mechanically connected to the column for the analysis of the separated compounds of sample gas with electronic means, e.g., ion cell, field emitter and PIN diode. 7 figs.
Inventors:
Issue Date:
OSTI Identifier:
415726
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 400102; PA: EDB-97:015554; SN: 97001714613
Patent Number(s):
US 5,583,281/A/
Application Number:
PAN: 8-499,625
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 10 Dec 1996
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
40 CHEMISTRY; EXTRACTION COLUMNS; DESIGN; GAS CHROMATOGRAPHY; MINIATURIZATION; SEPARATION PROCESSES; GAS ANALYSIS

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