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Title: Optical processing furnace with quartz muffle and diffuser plate

Abstract

An optical furnace for annealing a process wafer is disclosed comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy. 5 figs.

Inventors:
Issue Date:
Research Org.:
Midwest Research Institute, Kansas City, MO (United States); National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
403665
Patent Number(s):
5,577,157
Application Number:
PAN: 8-462,752
Assignee:
Midwest Research Inst., Kansas City, MO (United States)
DOE Contract Number:  
AC02-83CH10093
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 19 Nov 1996
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; SEMICONDUCTOR MATERIALS; ANNEALING; FURNACES; DESIGN; MATERIALS HANDLING EQUIPMENT; VISIBLE RADIATION; MONITORS; CONTROL EQUIPMENT; LIGHT SOURCES

Citation Formats

Sopori, B L. Optical processing furnace with quartz muffle and diffuser plate. United States: N. p., 1996. Web.
Sopori, B L. Optical processing furnace with quartz muffle and diffuser plate. United States.
Sopori, B L. Tue . "Optical processing furnace with quartz muffle and diffuser plate". United States.
@article{osti_403665,
title = {Optical processing furnace with quartz muffle and diffuser plate},
author = {Sopori, B L},
abstractNote = {An optical furnace for annealing a process wafer is disclosed comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy. 5 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {11}
}