Optical processing furnace with quartz muffle and diffuser plate
Abstract
An optical furnace for annealing a process wafer is disclosed comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy. 5 figs.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 403665
- Patent Number(s):
- 5577157
- Application Number:
- PAN: 8-462,752
- Assignee:
- Midwest Research Inst., Kansas City, MO (United States)
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 19 Nov 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; SEMICONDUCTOR MATERIALS; ANNEALING; FURNACES; DESIGN; MATERIALS HANDLING EQUIPMENT; VISIBLE RADIATION; MONITORS; CONTROL EQUIPMENT; LIGHT SOURCES
Citation Formats
Sopori, B. L. Optical processing furnace with quartz muffle and diffuser plate. United States: N. p., 1996.
Web.
Sopori, B. L. Optical processing furnace with quartz muffle and diffuser plate. United States.
Sopori, B. L. Tue .
"Optical processing furnace with quartz muffle and diffuser plate". United States.
@article{osti_403665,
title = {Optical processing furnace with quartz muffle and diffuser plate},
author = {Sopori, B. L.},
abstractNote = {An optical furnace for annealing a process wafer is disclosed comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy. 5 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 19 00:00:00 EST 1996},
month = {Tue Nov 19 00:00:00 EST 1996}
}
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