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Title: Pulsed source ion implantation apparatus and method

Abstract

A new pulsed plasma-immersion ion-implantation apparatus that implants ions in large irregularly shaped objects to controllable depth without overheating the target, minimizing voltage breakdown, and using a constant electrical bias applied to the target. Instead of pulsing the voltage applied to the target, the plasma source, for example a tungsten filament or a RF antenna, is pulsed. Both electrically conducting and insulating targets can be implanted. 16 figs.

Inventors:
Issue Date:
Research Org.:
University of California
OSTI Identifier:
378141
Patent Number(s):
5,558,718
Application Number:
PAN: 8-225,043
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 24 Sep 1996
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MATERIALS; ION IMPLANTATION; EQUIPMENT; DESIGN; CRYSTAL DOPING; ELECTRIC POTENTIAL; PLASMA PRODUCTION; ION SOURCES; ELECTRIC CONDUCTIVITY; ELECTRICAL INSULATORS

Citation Formats

Leung, K N. Pulsed source ion implantation apparatus and method. United States: N. p., 1996. Web.
Leung, K N. Pulsed source ion implantation apparatus and method. United States.
Leung, K N. Tue . "Pulsed source ion implantation apparatus and method". United States.
@article{osti_378141,
title = {Pulsed source ion implantation apparatus and method},
author = {Leung, K N},
abstractNote = {A new pulsed plasma-immersion ion-implantation apparatus that implants ions in large irregularly shaped objects to controllable depth without overheating the target, minimizing voltage breakdown, and using a constant electrical bias applied to the target. Instead of pulsing the voltage applied to the target, the plasma source, for example a tungsten filament or a RF antenna, is pulsed. Both electrically conducting and insulating targets can be implanted. 16 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {9}
}