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Title: Phase shifting diffraction interferometer

An interferometer which has the capability of measuring optical elements and systems with an accuracy of {lambda}/1000 where {lambda} is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about {lambda}/50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms. 8 figs.
Inventors:
Issue Date:
OSTI Identifier:
372585
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 440600; PA: EDB-96:145101; SN: 96001644977
Patent Number(s):
US 5,548,403/A/
Application Number:
PAN: 8-345,878
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 29 Aug 1996
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; INTERFEROMETERS; DESIGN; OPTICAL SYSTEMS; VISIBLE RADIATION; SIGNAL-TO-NOISE RATIO; DATA ANALYSIS

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