Phase shifting diffraction interferometer
Abstract
An interferometer which has the capability of measuring optical elements and systems with an accuracy of {lambda}/1000 where {lambda} is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about {lambda}/50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms. 8 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- OSTI Identifier:
- 372585
- Patent Number(s):
- 5548403
- Application Number:
- PAN: 8-345,878
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 29 Aug 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; INTERFEROMETERS; DESIGN; OPTICAL SYSTEMS; VISIBLE RADIATION; SIGNAL-TO-NOISE RATIO; DATA ANALYSIS
Citation Formats
Sommargren, G E. Phase shifting diffraction interferometer. United States: N. p., 1996.
Web.
Sommargren, G E. Phase shifting diffraction interferometer. United States.
Sommargren, G E. Thu .
"Phase shifting diffraction interferometer". United States.
@article{osti_372585,
title = {Phase shifting diffraction interferometer},
author = {Sommargren, G E},
abstractNote = {An interferometer which has the capability of measuring optical elements and systems with an accuracy of {lambda}/1000 where {lambda} is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about {lambda}/50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Aug 29 00:00:00 EDT 1996},
month = {Thu Aug 29 00:00:00 EDT 1996}
}