Process to form mesostructured films
Abstract
This invention comprises a method to form a family of supported films with pore size in the approximate range 0.8-20 nm exhibiting highly ordered microstructures and porosity derived from an ordered micellar or liquid-crystalline organic-inorganic precursor structure that forms during film deposition. Optically transparent, 100-500-nm thick films exhibiting a unique range of microstructures and uni-modal pore sizes are formed in seconds in a continuous coating operation. Applications of these films include sensors, membranes, low dielectric constant interlayers, anti-reflective coatings, and optical hosts. 12 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 321307
- Patent Number(s):
- 5858457
- Application Number:
- PAN: 8-937,407
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 12 Jan 1999
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; FABRICATION; FILMS; USES; MEMBRANES; DIELECTRIC MATERIALS; ANTIREFLECTION COATINGS; MICROSTRUCTURE; POROSITY; LIQUID CRYSTALS; PRECURSOR; MICELLAR SYSTEMS
Citation Formats
Brinker, C J, Anderson, M T, Ganguli, R, and Lu, Y F. Process to form mesostructured films. United States: N. p., 1999.
Web.
Brinker, C J, Anderson, M T, Ganguli, R, & Lu, Y F. Process to form mesostructured films. United States.
Brinker, C J, Anderson, M T, Ganguli, R, and Lu, Y F. Tue .
"Process to form mesostructured films". United States.
@article{osti_321307,
title = {Process to form mesostructured films},
author = {Brinker, C J and Anderson, M T and Ganguli, R and Lu, Y F},
abstractNote = {This invention comprises a method to form a family of supported films with pore size in the approximate range 0.8-20 nm exhibiting highly ordered microstructures and porosity derived from an ordered micellar or liquid-crystalline organic-inorganic precursor structure that forms during film deposition. Optically transparent, 100-500-nm thick films exhibiting a unique range of microstructures and uni-modal pore sizes are formed in seconds in a continuous coating operation. Applications of these films include sensors, membranes, low dielectric constant interlayers, anti-reflective coatings, and optical hosts. 12 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}
Search for the full text at the U.S. Patent and Trademark Office
Note: You will be redirected to the USPTO site, which may require a pop-up blocker to be deactivated to view the patent. If so, you will need to manually turn off your browser's pop-up blocker, typically found within the browser settings. (See DOE Patents FAQs for more information.)
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.