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Title: Diamond film growth argon-carbon plasmas

Abstract

A method and system are disclosed for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate. 29 figs.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Univ. of Chicago, IL (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
321209
Patent Number(s):
5849079
Application Number:
PAN: 8-417,154
Assignee:
Univ. of Chicago, IL (United States)
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 15 Dec 1998
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DIAMONDS; CHEMICAL REACTORS; PLASMA PRODUCTION; SURFACE COATING; CARBONACEOUS MATERIALS

Citation Formats

Gruen, D M, Krauss, A R, Liu, S Z, Pan, X Z, and Zuiker, C D. Diamond film growth argon-carbon plasmas. United States: N. p., 1998. Web.
Gruen, D M, Krauss, A R, Liu, S Z, Pan, X Z, & Zuiker, C D. Diamond film growth argon-carbon plasmas. United States.
Gruen, D M, Krauss, A R, Liu, S Z, Pan, X Z, and Zuiker, C D. Tue . "Diamond film growth argon-carbon plasmas". United States.
@article{osti_321209,
title = {Diamond film growth argon-carbon plasmas},
author = {Gruen, D M and Krauss, A R and Liu, S Z and Pan, X Z and Zuiker, C D},
abstractNote = {A method and system are disclosed for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate. 29 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {12}
}