Surface treatment of ceramic articles
Abstract
A process is disclosed for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article. 15 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States)
- OSTI Identifier:
- 321204
- Patent Number(s):
- 5851475
- Application Number:
- PAN: 8-667,502; CNN: Grant MSS-8996309; TRN: 99:003296
- Assignee:
- Univ. of California, Oakland, CA (United States); IBM, San Jose, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 22 Dec 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; CERAMICS; SURFACE TREATMENTS; MATERIALS HANDLING EQUIPMENT; ION IMPLANTATION; PLASMA PRODUCTION; SURFACE PROPERTIES
Citation Formats
Komvopoulos, K, Brown, I G, Wei, B, Anders, S, Anders, A, and Bhatia, C S. Surface treatment of ceramic articles. United States: N. p., 1998.
Web.
Komvopoulos, K, Brown, I G, Wei, B, Anders, S, Anders, A, & Bhatia, C S. Surface treatment of ceramic articles. United States.
Komvopoulos, K, Brown, I G, Wei, B, Anders, S, Anders, A, and Bhatia, C S. Tue .
"Surface treatment of ceramic articles". United States.
@article{osti_321204,
title = {Surface treatment of ceramic articles},
author = {Komvopoulos, K and Brown, I G and Wei, B and Anders, S and Anders, A and Bhatia, C S},
abstractNote = {A process is disclosed for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article. 15 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {12}
}