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Title: Surface treatment of ceramic articles

Abstract

A process is disclosed for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article. 15 figs.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
University of California
Sponsoring Org.:
USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States)
OSTI Identifier:
321204
Patent Number(s):
5,851,475
Application Number:
PAN: 8-667,502; CNN: Grant MSS-8996309; TRN: 99:003296
Assignee:
Univ. of California, Oakland, CA (United States); IBM, San Jose, CA (United States) PTO; SCA: 360201; 360206; PA: EDB-99:030399; SN: 99002058480
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 22 Dec 1998
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CERAMICS; SURFACE TREATMENTS; MATERIALS HANDLING EQUIPMENT; ION IMPLANTATION; PLASMA PRODUCTION; SURFACE PROPERTIES

Citation Formats

Komvopoulos, K., Brown, I.G., Wei, B., Anders, S., Anders, A., and Bhatia, C.S. Surface treatment of ceramic articles. United States: N. p., 1998. Web.
Komvopoulos, K., Brown, I.G., Wei, B., Anders, S., Anders, A., & Bhatia, C.S. Surface treatment of ceramic articles. United States.
Komvopoulos, K., Brown, I.G., Wei, B., Anders, S., Anders, A., and Bhatia, C.S. Tue . "Surface treatment of ceramic articles". United States.
@article{osti_321204,
title = {Surface treatment of ceramic articles},
author = {Komvopoulos, K. and Brown, I.G. and Wei, B. and Anders, S. and Anders, A. and Bhatia, C.S.},
abstractNote = {A process is disclosed for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article. 15 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {12}
}