Particle-free microchip processing
Abstract
Method and apparatus for reducing particulate contamination in microchip processing are disclosed. The method and apparatus comprise means to reduce particle velocity toward the wafer before the particles can be deposited on the wafer surface. A reactor using electric fields to reduce particle velocity and prevent particulate contamination is disclosed. A reactor using a porous showerhead to reduce particle velocities and prevent particulate contamination is disclosed. 5 figs.
- Inventors:
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 242596
- Patent Number(s):
- 5522933
- Application Number:
- PAN: 8-246,049
- Assignee:
- SNL; SCA: 426000; 320303; PA: EDB-96:094809; SN: 96001600398
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 4 Jun 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MICROELECTRONIC CIRCUITS; FABRICATION; CHEMICAL REACTORS; DESIGN; IMPURITIES
Citation Formats
Geller, A S, and Rader, D J. Particle-free microchip processing. United States: N. p., 1996.
Web.
Geller, A S, & Rader, D J. Particle-free microchip processing. United States.
Geller, A S, and Rader, D J. Tue .
"Particle-free microchip processing". United States.
@article{osti_242596,
title = {Particle-free microchip processing},
author = {Geller, A S and Rader, D J},
abstractNote = {Method and apparatus for reducing particulate contamination in microchip processing are disclosed. The method and apparatus comprise means to reduce particle velocity toward the wafer before the particles can be deposited on the wafer surface. A reactor using electric fields to reduce particle velocity and prevent particulate contamination is disclosed. A reactor using a porous showerhead to reduce particle velocities and prevent particulate contamination is disclosed. 5 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {6}
}
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