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Title: Particle-free microchip processing

Abstract

Method and apparatus for reducing particulate contamination in microchip processing are disclosed. The method and apparatus comprise means to reduce particle velocity toward the wafer before the particles can be deposited on the wafer surface. A reactor using electric fields to reduce particle velocity and prevent particulate contamination is disclosed. A reactor using a porous showerhead to reduce particle velocities and prevent particulate contamination is disclosed. 5 figs.

Inventors:
;
Issue Date:
Research Org.:
AT&T Corporation
OSTI Identifier:
242596
Patent Number(s):
5,522,933
Application Number:
PAN: 8-246,049
Assignee:
SNL; SCA: 426000; 320303; PA: EDB-96:094809; SN: 96001600398
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 4 Jun 1996
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MICROELECTRONIC CIRCUITS; FABRICATION; CHEMICAL REACTORS; DESIGN; IMPURITIES

Citation Formats

Geller, A S, and Rader, D J. Particle-free microchip processing. United States: N. p., 1996. Web.
Geller, A S, & Rader, D J. Particle-free microchip processing. United States.
Geller, A S, and Rader, D J. Tue . "Particle-free microchip processing". United States.
@article{osti_242596,
title = {Particle-free microchip processing},
author = {Geller, A S and Rader, D J},
abstractNote = {Method and apparatus for reducing particulate contamination in microchip processing are disclosed. The method and apparatus comprise means to reduce particle velocity toward the wafer before the particles can be deposited on the wafer surface. A reactor using electric fields to reduce particle velocity and prevent particulate contamination is disclosed. A reactor using a porous showerhead to reduce particle velocities and prevent particulate contamination is disclosed. 5 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {6}
}