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Title: Tunable doping of carbon nanotubes through engineered atomic layer deposition

Abstract

A carbon nanotube field effect transistor (CNFET), that has a channel formed of carbon nanotubes (CNTs), includes a layered deposit of a nonstoichiometric doping oxide (NDO), such as HfOX, where the concentration of the NDO varies through the thickness of the layer(s). An n-type metal-oxide semiconductor (NMOS) CNFET made in this manner can achieve similar ON-current, OFF-current, and/or threshold voltage magnitudes to a corresponding p-type metal-oxide semiconductor (PMOS) CNFET. Such an NMOS and PMOS can be used to achieve a symmetric complementary metal-oxide semiconductor (CMOS) CNFET design.

Issue Date:
Research Org.:
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
2293932
Patent Number(s):
11832458
Application Number:
17/211,329
Assignee:
Massachusetts Institute of Technology (Cambridge, MA)
DOE Contract Number:  
W909MY-16-1-0001
Resource Type:
Patent
Resource Relation:
Patent File Date: 03/24/2021
Country of Publication:
United States
Language:
English

Citation Formats

. Tunable doping of carbon nanotubes through engineered atomic layer deposition. United States: N. p., 2023. Web.
. Tunable doping of carbon nanotubes through engineered atomic layer deposition. United States.
. Tue . "Tunable doping of carbon nanotubes through engineered atomic layer deposition". United States. https://www.osti.gov/servlets/purl/2293932.
@article{osti_2293932,
title = {Tunable doping of carbon nanotubes through engineered atomic layer deposition},
author = {},
abstractNote = {A carbon nanotube field effect transistor (CNFET), that has a channel formed of carbon nanotubes (CNTs), includes a layered deposit of a nonstoichiometric doping oxide (NDO), such as HfOX, where the concentration of the NDO varies through the thickness of the layer(s). An n-type metal-oxide semiconductor (NMOS) CNFET made in this manner can achieve similar ON-current, OFF-current, and/or threshold voltage magnitudes to a corresponding p-type metal-oxide semiconductor (PMOS) CNFET. Such an NMOS and PMOS can be used to achieve a symmetric complementary metal-oxide semiconductor (CMOS) CNFET design.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {11}
}

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