Small gap device system and method of fabrication
Abstract
A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
- Inventors:
- Issue Date:
- Research Org.:
- Spark Thermionics, Inc., Berkeley, CA (United States); Univ. of Pennsylvania, Philadelphia, PA (United States)
- Sponsoring Org.:
- USDOE Advanced Research Projects Agency - Energy (ARPA-E)
- OSTI Identifier:
- 2293733
- Patent Number(s):
- 11791143
- Application Number:
- 17/497,342
- Assignee:
- Spark Thermionics, Inc. (Berkeley, CA); The Trustees of the University of Pennsylvania (Philadelphia, PA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AR00000664
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10/08/2021
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Schwede, Jared William, Bargatin, Igor, Nicaise, Samuel M., Lin, Chen, and Provine, John. Small gap device system and method of fabrication. United States: N. p., 2023.
Web.
Schwede, Jared William, Bargatin, Igor, Nicaise, Samuel M., Lin, Chen, & Provine, John. Small gap device system and method of fabrication. United States.
Schwede, Jared William, Bargatin, Igor, Nicaise, Samuel M., Lin, Chen, and Provine, John. Tue .
"Small gap device system and method of fabrication". United States. https://www.osti.gov/servlets/purl/2293733.
@article{osti_2293733,
title = {Small gap device system and method of fabrication},
author = {Schwede, Jared William and Bargatin, Igor and Nicaise, Samuel M. and Lin, Chen and Provine, John},
abstractNote = {A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {10}
}
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